Etude De L’effet Du Recuit Sur Les Propriétés Optiques Des Couches Minces De Tio2 Élaborées Par Procédé Sol-gel
Résumé: n this work, amorphous and crystallized anatase titanium dioxide (TiO2) thin films with promising properties for photonic applications were synthesized by sol-gel process with dip-coating technique on a glass substrate. The obtained films were annealed for one hour at different heat treatment temperatures. Effect of annealing temperature on the structural, morphological and optical properties of multilayer films were investigated by X-ray diffraction (XRD), Atomic force microscopy (AFM) and UV-Visible spectrophotometry. The results indicate that all TiO2 thin films annealed at 300°C were amorphous, whereas the films heat-treated at higher temperature exhibit XRD patterns corresponding to the anatase phase. From the analyses made on the AFM images, it was revealed that morphology and surface roughness of the films were affected by heat treatment temperature. According to UV-Visible measurements, multilayer TiO2 thin films were transparent with about more than 77% average optical transmissions in the visible region. Whereas, a slight fall in average transmission was observed with annealing temperature. The bandgap energy of multilayered TiO2 films was found to increase exceptionally as the annealing temperature increased from 500 to 600°C
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