Mechanical And Structural Studies Of Ternary Mo–zr–n Layers Deposited On Substrate By Pvd

Résumé: Our study of ternary Mo–Zr–N thin layers is novel with the objective of improving certain mechanical and tribological characteristics and of find-ing the appropriate stoichiometry to have the microstructure, which ori-entates to the desired properties, using the characterization techniques: SEM, XRD, EDS, XPS, WDS and similar methods as well as nanoindenta-tion, alternative tribometry and scratch test. The morphological study of ternary Mo–Zr–N coating shows that the (111) orientation of texture is preferred essentially due to residual internal stresses. During the devel-opment of the Mo–Zr–N deposits, we have noticed that the addition of Zr results in multiphases consisting of binary ZrN, MoN and MoZrN nitrides with a prism-shaped structure. The coefficient of friction is low for Mo–N coating and low zirconium levels. The Young’s modulus takes values al-most very close that is indicated for values below 100 at.% of Zr. The crystalline structure does not affect the resistance capacity of the materi-al. The introduction of zirconium particles destabilizes the compound be-cause zirconium atomic radius (0.138 nm) is higher than that of molyb-denum (0.126 nm), and the lattice is distorted that explains these residual stresses.

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